ESL480: Difference between revisions
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| credit_structure = 3-0-0 | | credit_structure = 3-0-0 | ||
| pre_requisites = | | pre_requisites = | ||
| overlaps = Some overlap with ESL737 | | overlaps = Some overlap with [[ESL737]] | ||
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== ESL480 : plasma Chemistry == | == ESL480 : plasma Chemistry == | ||
Basic concepts of plasma, Thermal and non-thermal plasma chemistry, Elementary chemical reactions in plasmas, Various atomic and molecular collisions, Collision cross section, frequency and rate constant, Plasma sheath and potential; Chemical equilibrium and kinetics; Enthalpy and Gibbs free energy; Surface processes-plasma wall interaction- Adsorption, desorption, sticking coefficient, Chemical surface reactions, Surface diffusion. Ion bombardment; Uniform density discharge model, Particle and energy balance, Plasma diagnostics- Probe measurements, Emission and absorption spectroscopy, Applications of surface and volume plasma chemistry: Plasma etching, Chemical vapour deposition, flue and exhaust gas treatment, Excimer light source. | Basic concepts of plasma, Thermal and non-thermal plasma chemistry, Elementary chemical reactions in plasmas, Various atomic and molecular collisions, Collision cross section, frequency and rate constant, Plasma sheath and potential; Chemical equilibrium and kinetics; Enthalpy and Gibbs free energy; Surface processes-plasma wall interaction- Adsorption, desorption, sticking coefficient, Chemical surface reactions, Surface diffusion. Ion bombardment; Uniform density discharge model, Particle and energy balance, Plasma diagnostics- Probe measurements, Emission and absorption spectroscopy, Applications of surface and volume plasma chemistry: Plasma etching, Chemical vapour deposition, flue and exhaust gas treatment, Excimer light source. | ||
Latest revision as of 16:33, 14 April 2026
| ESL480 | |
|---|---|
| plasma Chemistry | |
| Credits | 3 |
| Structure | 3-0-0 |
| Pre-requisites | |
| Overlaps | Some overlap with ESL737 |
ESL480 : plasma Chemistry
Basic concepts of plasma, Thermal and non-thermal plasma chemistry, Elementary chemical reactions in plasmas, Various atomic and molecular collisions, Collision cross section, frequency and rate constant, Plasma sheath and potential; Chemical equilibrium and kinetics; Enthalpy and Gibbs free energy; Surface processes-plasma wall interaction- Adsorption, desorption, sticking coefficient, Chemical surface reactions, Surface diffusion. Ion bombardment; Uniform density discharge model, Particle and energy balance, Plasma diagnostics- Probe measurements, Emission and absorption spectroscopy, Applications of surface and volume plasma chemistry: Plasma etching, Chemical vapour deposition, flue and exhaust gas treatment, Excimer light source.