ESL480
| ESL480 | |
|---|---|
| plasma Chemistry | |
| Credits | 3 |
| Structure | 3-0-0 |
| Pre-requisites | |
| Overlaps | Some overlap with ESL737 |
ESL480 : plasma Chemistry
[edit]Basic concepts of plasma, Thermal and non-thermal plasma chemistry, Elementary chemical reactions in plasmas, Various atomic and molecular collisions, Collision cross section, frequency and rate constant, Plasma sheath and potential; Chemical equilibrium and kinetics; Enthalpy and Gibbs free energy; Surface processes-plasma wall interaction- Adsorption, desorption, sticking coefficient, Chemical surface reactions, Surface diffusion. Ion bombardment; Uniform density discharge model, Particle and energy balance, Plasma diagnostics- Probe measurements, Emission and absorption spectroscopy, Applications of surface and volume plasma chemistry: Plasma etching, Chemical vapour deposition, flue and exhaust gas treatment, Excimer light source.