https://wiki.devclub.in/index.php?action=history&feed=atom&title=MLL742MLL742 - Revision history2026-04-09T09:36:09ZRevision history for this page on the wikiMediaWiki 1.45.1https://wiki.devclub.in/index.php?title=MLL742&diff=1569&oldid=prevPrashantt492: Creating course page via bot2026-03-04T10:13:43Z<p>Creating course page via bot</p>
<p><b>New page</b></p><div>{{Infobox Course<br />
| code = MLL742<br />
| name = Micro and Nano Fabrication in Materials Engineering<br />
| credits = 3<br />
| credit_structure = 3-0-0<br />
| pre_requisites = <br />
| overlaps = MCL331<br />
}}<br />
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== MLL742 : Micro and Nano Fabrication in Materials Engineering ==<br />
Introduction to microfabrication, crystal growth and defect, diffusion and ion implantation, wafer preparation and specifications, thermal oxidation: Deal-Grove model of oxidation, rapid thermal annealing, pattern transfer by optical and ebeam lithography, photoresist, vacuum science and plasmas, etching, physical (DC and RF sputtering, ebeam evaporation) and chemical vapor deposition, stress measurement in thin film, silicon micromachining.</div>Prashantt492